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并对不同背衬下的情况进行了计算并分析了谐振特性。
The resonant characteristics is calculated and analyzed in different backings.
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我们利用压阻检测法对双端固支硅纳米梁的谐振特性进行了研究。
We investigate the resonant response of piezoresistive double-clamped silicon nano-beam.