All samples were prepared by rf magnetron sputtering method.

所有样品采用射频辅助磁控溅射方法制备。

The kinetic process of reactive magnetron sputtering has been studied.

研究了反应磁控溅射的动力学过程。

The glass thin film for optical waveguides is deposited by the magnetron sputtering?

采用磁控射频溅射法制备光波导用玻璃薄膜。

Thin film manganin gages and ytterbium gages were fabricated by magnetron sputtering.

采用磁控溅射法制备锰铜薄膜，溅射和真空蒸发法制备镱薄膜。

Reactive magnetron sputtering was used to prepare many kinds of compound films extensively.

反应磁控溅射被广泛应用于制备化合物薄膜。