Why not use photolithography to make nano structures?

为什么不使用光蚀刻法制造奈米结构？

Spherical aberration can damage image quality in photolithography.

球面像差能破坏光刻的成像质量。

First, consider the advantages and disadvantages of photolithography.

首先，想想光蚀刻法的优点跟缺点。

The patterned anodic aluminum oxide (AAO) template was fabricated by UV-photolithography.

采用紫外光刻法制得图案化的阳极氧化铝模板。

The photo-induced etching effect, or development-free vapor photolithography is a very interesting phenomenon.

光致诱蚀作用或无显影气相光刻作用是一个非常有趣的现象。