The fabrication process of the devices is simple.

器件制造工艺简单。

The optimization of the MEMS fabrication process is analyzed.

分析了MEMS制作工艺的改进。

Good understanding of mechanical design and fabrication process.

对机械设计和制造流程有透彻的了解。

The kernel problem in virtual MEMS fabrication process is process model.

MEMS加工工艺的核心是工艺模型。

The fabrication process and application of silicon carbide mirror are presented.

综述了碳化硅反射镜材料常用制备方法的特点。